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Micro Process Engineering: Fundamentals, Devices, Fabrication, and Applications
Norbert Kockmann (Editor), Oliver Brand (Series Editor), Gary K. Fedder (Series Editor), Christofer Hierold (Series Editor), Jan G. Korvink (Series Editor), Osamu Tabata (Series Editor)
ISBN: 978-3-527-33500-8
July 2014
529 pages