Fundamental Principles of Optical Lithography: The Science of Microfabrication

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Description

The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components.

By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate.

This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter.

Additional Information:
Visiting http://www.lithoguru.com/textbook/index.html enhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB®, to accompany the textbook. You can also contact the author and find help for instructors.

About the Author

Dr. Chris A. Mack developed the lithography simulation software PROLITH, and founded and ran the company FINLE Technologies fro ten years. He then served as Vice President of Lithography Technology for KLA-Tencor for five years, until 2005. In 2003 he received the SEMI Award for North America for his efforts in lithography simulation and education. He is also an adjunct faculty member at the University of Texas at Austin. Currently, he writes, teaches, and consults on the field of semiconductor microlithography in Austin, Texas.

Features

Covers material required for a full semester course on optical lithography with principles, methods and future developments
Presents a thorough mathematical treatment of lithography, suitable for use in a graduate level course, with problems at the end of each chapter
Optional computer simulation exercises are included at the end of each chapter
Appropriate both to universities and to people in industry who need to self-teach themselves lithography
Presents an important industrial topic that accounts for approximately 30% of costs in the manufacturing of electronic devices
More author information and a free laboratory manual can be found at http://www.lithoguru.com/textbook/index.html

To Purchase this product, please visit

https://dev.store.wiley.com/en-us/Fundamental+Principles+of+Optical+Lithography%3A+The+Science+of+Microfabrication-p-9780470723876