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A Users Guide to Vacuum Technology, 4th Edition

ISBN: 978-1-394-17413-3

October 2023

576 pages

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Description
A USERS GUIDE TO VACUUM TECHNOLOGY

Choose and understand the vacuum technology that fits your project’s needs with this indispensable guide

Vacuum technology is used to provide process environments for other kinds of engineering technology, making it an unsung cornerstone of hundreds of projects incorporating analysis, research and development, manufacturing, and more. Since it is very often a secondary technology, users primarily interested in processes incorporating it will frequently only encounter vacuum technology when purchasing or troubleshooting. There is an urgent need for a guide to vacuum technology made with these users in mind.

For decades, A User’s Guide to Vacuum Technology has met this need, with a user-focused introduction to vacuum technology as it is incorporated into semiconductor, optics, solar sell, and other engineering processes. With an emphasis on otherwise neglected subjects and on accessibility to the secondary user of vacuum technology, it balances treatment of older systems that are still in use with a survey of the latest cutting-edge technologies. The result promises to continue as the essential guide to vacuum systems.

Readers of the fourth edition of A User’s Guide to Vacuum Technology will also find:

  • Expanded treatment of gauges, pumps, materials, systems, and best??operating practices
  • Detailed discussion of cutting-edge topics like ultraclean vacuum and contamination control
  • An authorial team with decades of combined research and engineering experience

A User’s Guide to Vacuum Technology is essential for those entering emerging STEM programs, engineering professionals and graduate students working with a huge range of engineering technologies.

About the Author

John F. O'Hanlon, PhD, Emeritus Professor of Electrical and Computer Engineering at the University of Arizona, Tucson, USA and retired IBM Research Staff Member. He is a Senior Member of the IEEE, a Fellow of the AVS and has published widely on vacuum technology and related subjects.

Timothy A. Gessert, PhD, is Principal Scientist and Managing Member of Gessert Consulting, LLC, USA, former Principal Scientist at the National Renewable Energy Laboratory, USA, and Fellow and Past President of the AVS. He has published extensively on vacuum technology and related subjects.