Microstereolithography and other Fabrication Techniques for 3D MEMS

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Microstereolithography and other Fabrication Techniques for 3D MEMS

Vijay K. Varadan,Xiaoning Jiang,V. V. Varadan

Description

The application of MEMS (micro-electro-mechanical systems) in such diverse fields as intelligent microsensors, data storage, biomedical engineering and wireless communication is booming. Focusing on microstereolithography, this timely work provides insight into state-of-the-art microfabrication techniques for 3D microstructures, microdevices and MEMS.
* A unique and accessible overview of micro-system manufacture using the latest semiconductor processing techniques
* Coverage of the developmental history of MEMS, micro-sensors, actuators and signal processing units.
* Insight to a range of microfabrication techniques from laser ablation to x-ray lithography, silicon micro-machining and micro-moulding.
* Describes the latest fabrication prototypes and applications, including thin-film transistors, antennas, wireless telemetry systems and transducers
Microelectronics engineers will profit form this detailed overview of current technologies. Material technologists and physicists working in industrial and academic research and development will also find this a valuable reference source.

About the Author

Vijay K. Varadan, Department of Electrical Engineering, University of Arkansas, Fayetteville, Arizona, USA
Vijay Varadan is an established Wiley author and is currently a Professor in the Department of Electrical Engineering at the University of Arkansas, USA.? Varadan's new book for Wiley, Smart Material Systems and MEMS, is due to publish later this year, and he has previously co-authored Microwave Electronics, RF MEMS and their Applications, Microsensors, MEMS and Smart Devices and Microstereolithography and other Fabrication Techniques for 3D MEMS. He is also Editor-in-Chief of the SPIE's Journal of Smart Materials and Structures.

To Purchase this product, please visit

https://dev.store.wiley.com/en-ca/Microstereolithography+and+other+Fabrication+Techniques+for+3D+MEMS-p-9780471521853