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Spectroscopic Ellipsometry and Reflectometry: A User's Guide

Harland G. Tompkins, William A. McGahan 

ISBN: 978-0-471-18172-9

March 1999

248 pages

To Purchase this product, please visit
https://dev.store.wiley.com/en-ca/Spectroscopic+Ellipsometry+and+Reflectometry%3A+A+User's+Guide-p-9780471181729

Spectroscopic Ellipsometry and Reflectometry: A User's Guide

Harland G. Tompkins,William A. McGahan

Hardcover
978-0-471-18172-9
March 1999
CAD $246.95
Description
While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry. A guide for practitioners and researchers in a variety of disciplines, it addresses a broad range of applications in physics, chemistry, electrical engineering, and materials science.
About the Author

Harland Tompkins retired from full-time employment in 2001. During his full-time employment, he was employed by General Electric Co., Bell Laboratories, the Idaho National Engineering Lab, and Motorola.

William A. McGahan is the author of Spectroscopic Ellipsometry and Reflectometry: A User's Guide, published by Wiley.

To Purchase this product, please visit
https://dev.store.wiley.com/en-ca/Spectroscopic+Ellipsometry+and+Reflectometry%3A+A+User's+Guide-p-9780471181729