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Microengineering of Metals and Ceramics: Special Replication Techniques, Automation, and Properties
Henry Baltes (Editor), Oliver Brand (Editor), Gary K. Fedder (Editor), Christofer Hierold (Editor), Jan G. Korvink (Editor), Osamu Tabata (Editor), Detlef Löhe (Editor), Jürgen Hausselt (Editor)
ISBN: 978-3-527-61695-4
September 2008
306 pages